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Introductory MEMS: Fabrication and Applications Thomas M. Adams
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Introductory MEMS: Fabrication and Applications
Thomas M. Adams
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.
462 pages, 25 black & white illustrations, 25 colour illustrations, 20 black & white tables, biograp
| Mídia | Livros Hardcover Book (Livro com lombada e capa dura) |
| Lançado | 21 de dezembro de 2009 |
| Data do lançamento original | 2008 |
| ISBN13 | 9780387095103 |
| Editoras | Springer-Verlag New York Inc. |
| Páginas | 444 |
| Dimensões | 241 × 166 × 33 mm · 771 g |
| Idioma | Inglês |
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