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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration Jean Laconte 2006 edition
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Jean Laconte
Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. This title demonstrates the successful co-integration of gas-flow sensors on dielectric membrane.
292 pages, biography
| Mídia | Livros Hardcover Book (Livro com lombada e capa dura) |
| Lançado | 11 de abril de 2006 |
| ISBN13 | 9780387288420 |
| Editoras | Springer-Verlag New York Inc. |
| Páginas | 292 |
| Dimensões | 155 × 235 × 19 mm · 607 g |
| Idioma | Inglês |