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Dry Etching Technology for Semiconductors Kazuo Nojiri 2015 edition
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Dry Etching Technology for Semiconductors
Kazuo Nojiri
Dry Etching Technology for Semiconductors
116 pages, 123 black & white illustrations, 5 black & white tables, biography
| Mídia | Livros Hardcover Book (Livro com lombada e capa dura) |
| Lançado | 3 de novembro de 2014 |
| ISBN13 | 9783319102948 |
| Editoras | Springer International Publishing AG |
| Páginas | 116 |
| Dimensões | 165 × 242 × 12 mm · 362 g |
| Idioma | Inglês Japonês |
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