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Rapid Thermal Processing of Semiconductors - Microdevices Victor E. Borisenko 1997 edition
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Rapid Thermal Processing of Semiconductors - Microdevices
Victor E. Borisenko
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.
358 pages, biography
| Mídia | Livros Hardcover Book (Livro com lombada e capa dura) |
| Lançado | 31 de maio de 1997 |
| ISBN13 | 9780306450549 |
| Editoras | Springer Science+Business Media |
| Páginas | 358 |
| Dimensões | 178 × 254 × 26 mm · 870 g |
| Idioma | Inglês |
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