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Handbook of Silicon Based MEMS Materials and Technologies - Micro & Nano Technologies Markku Tilli 3º edição
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Handbook of Silicon Based MEMS Materials and Technologies - Micro & Nano Technologies
Markku Tilli
1104 pages
| Mídia | Livros Paperback Book (Livro de capa flexível e brochura) |
| Lançado | 17 de abril de 2020 |
| ISBN13 | 9780128177860 |
| Editoras | Elsevier Science Publishing Co Inc |
| Páginas | 1026 |
| Dimensões | 275 × 216 × 54 mm · 2,33 kg |
| Editor | Lindroos, Veikko (Professor Emeritus, Physical Metallurgy and Materials Science, Aalto University, Finland) |
| Editor | Motooka, Teruaki (Professor Emeritus, Department of Materials Science and Engineering, Kyushu University, Japan) |
| Editor | Paulasto-Kroeckel, Mervi (Aalto University, School of Electrical Engineering, Finland) |
| Editor | Petzold, Matthias (Professor, Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Germany) |
| Editor | Theuss, Horst (Lead Principal, Infineon Technologies, AG, Germany) |
| Editor | Tilli, Markku (Director and Senior Vice President of Research, Okmetic, Finland (retired)) |
