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Wafer Bonding: Applications and Technology - Springer Series in Materials Science U. G÷sele 2004 edition
Wafer Bonding: Applications and Technology - Springer Series in Materials Science
U. G÷sele
The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off.
504 pages, 363 black & white illustrations, 20 colour illustrations, biography
| Mídia | Livros Hardcover Book (Livro com lombada e capa dura) |
| Lançado | 14 de maio de 2004 |
| ISBN13 | 9783540210498 |
| Editoras | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 504 |
| Dimensões | 155 × 235 × 33 mm · 839 g |
| Idioma | Inglês Alemão |
| Editor | Alexe, Marin |
| Editor | Goesele, Ulrich |